EPIR is located in Bolingbrook, Illinois, a Chicago suburb, and has a 26,460 square ft. facility with a 3,000 square ft. clean room, including the following equipment:

Five MBE reactors for material growth

Two with 3" Platen Reactors
Three with 9" Platen Reactors

A full suite of device fabrication and testing equipment

Inductively coupled plasma (ICP) etcher
Mask Aligner
Annealing Equipment
Metrology Tools
Metal Deposition Equipment